According to the main materials and functions of semiconductor parts, they can be divided into twelve categories, including silicon/silicon carbide parts, quartz parts, ceramic parts, metal parts, graphite parts, plastic parts, vacuum parts, seals, filtration parts, moving parts, electronic control parts and other parts. Among them, various categories of parts also include a number of subdivided products, such as vacuum parts, including vacuum gauge (measuring process vacuum), vacuum pressure gauge, gas flow meter (MFC), vacuum valve, vacuum pump and other key parts.
According to the service object of semiconductor parts, semiconductor core parts can be divided into two types, namely precision machine parts and general purchased parts. Precision machine parts are usually designed by the engineers of each semiconductor equipment company, and then outsourced processing, and will only be used for their own company's equipment, such as process chamber, transmission chamber, etc., relatively easy to domestication, generally on its surface treatment, precision machining and other technology requirements are high; General purchased parts are some general parts that have been verified for a long time and widely recognized by many equipment factories and manufacturers. They are more standardized and will be used by different equipment companies and also used as spare parts and consumables in the production line. For example, silicon structure, o-ring, valve, gauge, pump, face plate, shower head, etc.
