Showerhead
Showerhead is a core component of the semiconductor process. It is generally installed above the wafer as an electrode, used for film, etching process, etc. Thin films are formed and etched on wafers by spraying process gas to form semiconductors, applying set process temperatures during key steps in forming memory devices. This project aims to develop a complete replacement of imported aluminum alloy products, and master a complete set of design and processing solutions from raw material analysis, structural design to ultra-precision machining, and surface treatment.
Core technology
1. Ultra precision machining (More than 3300 holes must be processed at one time, and the surface flatness of the disk after processing reaches <0.25mm)
2. Surface coating treatment
